HualinKena Intelligent Wet Process Workstation is an upgrade based on traditional laboratory fume hoods, specially designed for highly corrosive and high-risk semiconductor processes such as wet processing, acid etching and cleaning. Centered on modular structure, full-dimensional safety interlock, precise parameter control and intelligent voice-based operation and maintenance, it fully complies with SEMI standards, clean laboratory regulations and actual production scenarios, and sets a new benchmark for semiconductor wet process ventilation equipment with quantifiable hard indicators.
Intelligent Human-Machine Interaction
1. Intelligent Voice Control
Adapted to semiconductor clean laboratory scenarios, equipped with an industrial-grade voice interaction system to realize full zero-contact operation, avoiding hidden dangers of cross-contamination and misoperation.
Fast voice response: supports recognition of Mandarin and industrial professional terms with a response time of less than 0.5 seconds. Core operations such as equipment start/stop, air volume adjustment, window lifting, lighting on/off and nitrogen filling can be directly controlled by voice.
High-precision command recognition: optimized for high-noise and high-humidity working conditions. The command recognition accuracy is not less than 99.2% under the equipment operating noise ≤67dB(A).
Voice safety linkage: automatically switches to safe exhaust mode when detecting operators approaching or receiving operation commands; in case of equipment fault alarm, it synchronizes voice broadcast and audible and visual prompts to deliver early warning information in time.
Custom command expansion: supports importing factory-customized operation commands to fit usage habits of different process scenarios and reduce the learning cost.
2. Intelligent Early Warning and Optimized Operation & Maintenance
Adopts a dual prediction model combining pressure difference and service time to accurately calculate the service life of high-efficiency filters, and pushes replacement warnings 72 hours in advance to avoid safety risks caused by filter failure.
Compatible with 485, Ethernet, MQTT and other communication protocols, accessible to the central control system for centralized linkage control of multiple equipment.
Automatically stores equipment operation data, supports historical data curve viewing and Excel export. Alarm records and maintenance ledgers are fully archived to meet factory audit and traceability management requirements.
Equipped with variable-frequency adaptive speed-regulating fans, achieving remarkable energy saving of no less than 30% compared with traditional fixed-frequency equipment.
Zero-Risk Operation
1. Multiple Safety Interlock Mechanisms
Infrared sensor door interlock: variable air volume control is linked immediately when the door is opened, the fan responds quickly within 1 second, and the exhaust air volume is automatically raised to the safety standard range.
Window height linkage control: real-time linkage between window operating height and face velocity. Enhanced exhaust is activated automatically when the height exceeds the limit, and audible and visual alarm is triggered if the window is not closed for a long time.
Automatic fire extinguishing with flame, smoke and temperature sensors (optional): equipped with multiple sensors. Once a fire is detected, it cuts off the fan, closes the fire damper and activates the fire extinguishing device synchronously, with a total response time of less than 3 seconds.
Emergency stop and power-off protection: equipped with a dedicated emergency stop button. One-key emergency stop and power-off protection can be implemented in emergencies, and air dampers are closed at the same time to effectively prevent toxic gas cross-flow and cross-contamination.
2. Leakage and Corrosion Protection
The cabinet is integrally made of PP and SUS316L anti-corrosive materials, resistant to highly corrosive media such as hydrofluoric acid, hydrochloric acid and hydrogen peroxide, with a corrosion resistance grade of 10 or above.
Two optional worktop styles: solid surface and perforated flow guide, matched with a bottom anti-leakage tray to form double protection against chemical corrosion.
Built with waste liquid leakage detection sensors to accurately capture leakage. Once triggered, audible and visual alarms are activated immediately with a three-color indicator light for high-brightness prompts, preventing safety hazards caused by chemical diffusion.
3. Hazardous Gas and Environmental Monitoring
Optional online monitoring sensors for hydrofluoric acid, hydrochloric acid, acetone, flammable gases, etc., with a gas detection accuracy of ±0.1%. When the gas concentration exceeds the limit, it automatically switches to maximum air volume exhaust mode and sends platform alarms synchronously.
Built-in temperature and humidity sensors in the chemical storage cabinet, with temperature accuracy ±0.1℃ and humidity accuracy ±1% RH. Data sampling is performed every second to monitor the cabinet environment in real time 24/7.
With quantifiable hard parameters, full-link safety design, modular structure adaptation and zero-contact voice interaction management, HualinKena Intelligent Wet Process Workstation provides stable, compliant and efficient ventilation protection for high-risk semiconductor processes such as wet processing, acid etching and cleaning. From laboratory R&D to mass production, it escorts cost reduction, efficiency improvement and compliant operation of high-end processes with standardized product performance.
