Email:xu@hlkncse.com
Tel:13358064333
Fluid Control Division​
The Four Key Indicators of Wafer Processing Performance

In the semiconductor wafer manufacturing industry, processing performance directly determines a company's market competitiveness, economic benefits, and customer satisfaction. Among these, four core indicators—WPH (Wafers Per Hour), Cp and Cpk values, uptime percentage, and rework rate—serve as crucial benchmarks for measuring wafer processing performance. They comprehensively cover capacity, process precision, equipment stability, and cost control, collectively forming the core support system for wafer processing quality and efficiency.


1. WPH (Wafers Per Hour): The Core Foundation of Capacity and Potential Revenue

WPH, or Wafers Per Hour, is the core indicator reflecting the raw capacity of wafer processing, directly determining the production scale and potential revenue of a production line. As fundamental capacity data in wafer manufacturing, WPH embodies the comprehensive operational efficiency of the line, encompassing the synergistic effects of multiple dimensions such as process beat optimization, equipment operating speed, and operator proficiency.


For wafer manufacturing enterprises, the level of WPH directly dictates their capacity ceiling: a higher WPH means more wafers can be processed per unit of time, leading to higher capacity utilization and the ability to undertake larger order volumes, thereby increasing potential revenue. Against the backdrop of volatile semiconductor market demand and tight order delivery cycles, optimizing WPH is a key lever for companies to seize market share and boost revenue. It also serves as an important basis for capacity planning and production scheduling.


2. Cp and Cpk Values: The Core Parameters for Measuring Process Consistency and Yield

Cp and Cpk values are core process capability indices during wafer processing, primarily used to measure the consistency and stability of the process. Their numerical values are directly linked to product defect rates and scrap rates. Specifically, the Cp value reflects the potential capability of the process, measuring the match between the process variation amplitude and the specification requirements. The Cpk value, on the other hand, accounts for both process variation and the deviation of the process center, making it more aligned with actual production scenarios and reflecting the practical conformance capability of the process.


The higher the Cp and Cpk values, the stronger the consistency of the process, the smaller the variations during wafer processing, the more stable the product quality, the fewer the defects, and consequently, the lower the scrap rate. In the highly precision-demanding semiconductor manufacturing industry, even minor process fluctuations can lead to wafer scrapping. Therefore, Cp and Cpk values are core parameters for ensuring product quality and improving yield, as well as important metrics for achieving refined production and reducing quality losses.


3. Uptime Percentage: A Key Factor Affecting Delivery and Customer Satisfaction

Uptime percentage, which is the ratio of a wafer processing tool's effective available time to its total planned runtime, directly reflects the tool's availability and stability, thereby affecting production delivery schedules and customer satisfaction. Wafer manufacturing relies on high-precision, high-stability processing tools. Tool downtime, failures, and maintenance all reduce uptime, disrupt production continuity, and result in capacity loss and delivery delays.


A higher uptime percentage indicates greater tool stability, fewer unplanned stoppages, and better production continuity, ensuring orders are delivered on schedule. For semiconductor manufacturers, on-time delivery is a core prerequisite for maintaining client relationships and building trust. Ensuring tool uptime is the foundation for achieving on-time delivery, while also reducing the risk of breach of contract and customer churn due to delays.


4. Rework Rate: A Vital Lever for Controlling Costs and Improving Efficiency

Rework rate refers to the percentage of wafers that require reprocessing out of the total number of wafers processed. It is a key metric for measuring the cost and production efficiency of wafer processing. The rework process consumes additional materials, labor, and machine hours, not only increasing manufacturing costs but also extending the production cycle and reducing overall production efficiency, indirectly impacting order delivery and capacity utilization.


Reducing the rework rate directly leads to cost savings and efficiency improvements: for every 1% reduction in rework rate, corresponding material waste and labor input can be decreased, shortening the production cycle and freeing up more capacity for processing qualified wafers. Therefore, strictly controlling the rework rate is a vital lever for companies to achieve lean production, control costs, and enhance core competitiveness. By optimizing processes, strengthening quality inspection, and improving operator proficiency, companies can lower the rework rate to maximize benefits.


The Synergistic Effect of the Four Indicators: Enhancing Comprehensive Wafer Processing Performance

The four indicators—WPH, Cp and Cpk values, uptime percentage, and rework rate—are not isolated; they are interconnected and work synergistically to determine the overall performance of wafer processing. Improving WPH requires the guarantee of uptime; otherwise, even with proper capacity planning, actual output may decline due to tool downtime. Enhancing Cp and Cpk values can reduce the rework rate, minimizing ineffective production waste and thereby increasing effective capacity and WPH. An increase in uptime also provides a stable production environment for process optimization and the improvement of Cp and Cpk values.


For semiconductor wafer manufacturing enterprises, only by focusing on all four indicators and achieving their collaborative optimization through technological upgrades, equipment maintenance, process refinement, and management enhancements can they balance capacity, quality, efficiency, and cost. This improves the comprehensive performance of wafer processing and secures a competitive advantage in the fierce market competition.