Preventive maintenance for semiconductor wet process equipment requires dividing maintenance contents by cycles, progressing from daily inspections to annual overhauls, comprehensively covering all components of the equipment with a focus on maintaining liquid-contacting components and precision control components. The specific contents are as follows:

1. Daily Maintenance (Before/After Daily Production)

Daily maintenance is carried out in coordination by equipment operators and maintenance personnel, focusing on checking the equipment surface, core operating parameters, and identifying obvious potential faults. The maintenance content is simple and time-consuming, including:

(1) Appearance Inspection: Check the equipment shell, pipelines, and valves for liquid leakage, damage, or looseness; inspect the interior of the equipment for debris or accumulated liquid.

(2) Parameter Check: Before starting the equipment, verify that core parameters such as heating temperature, chemical flow rate, and pump pressure are within the set range; after production, check if the equipment’s operating parameters are normal and review any abnormal alarm records.

(3) Cleaning: Clean residual chemicals and debris from the equipment surface, control panel, and nozzle surfaces; perform preliminary cleaning of the equipment filter screen to remove visible impurities.

(4) Safety Check: Verify that safety protection devices (e.g., protective doors, emergency stop buttons) are functioning properly; ensure secure connections for power supply, air source, and chemical pipelines.

2. Weekly Maintenance (After Weekly Operations)

Weekly maintenance is led by maintenance personnel with operator cooperation, focusing on inspecting and cleaning wear-prone components and pipelines. It is more detailed than daily maintenance, including:

(1) Wear-Prone Component Inspection: Check seals (e.g., pipeline seals, pump seals) for aging, deformation, or leakage; replace them promptly if abnormalities are found. Inspect the filter screen for clogging and clean or replace it thoroughly.

(2) Pipeline Maintenance: Check chemical pipelines and gas lines for clogging or aging; flush pipelines with standard-compliant cleaning solutions to remove residual chemicals and impurities. Verify smooth valve switching without sticking.

(3) Precision Component Inspection: Check the sensitivity of temperature and pressure sensors and perform simple calibration to ensure accurate parameter detection. Inspect nozzle atomization effects; disassemble and clean nozzles if atomization is uneven.

3. Monthly Maintenance (After Monthly Operations)

Monthly maintenance focuses on inspecting, calibrating, and servicing core components to reduce wear and extend equipment lifespan, including:

(1) Core Component Servicing: Disassemble and clean the pump body; inspect wear on the pump shaft and impeller, and apply special lubricating oil. Clean the heater to remove surface scale and residual chemicals, and check the integrity of heating tubes.

(2) Precision Calibration: Conduct comprehensive calibration of parameters like temperature, pressure, and flow rate to ensure operational accuracy meets production requirements. Calibrate mechanical transmission components to ensure smooth operation without abnormal noise.

(3) Spare Parts Inspection: Check the reserve status of commonly used wear-prone spare parts (e.g., seals, filter screens, nozzles) and replenish them promptly. Ensure spare parts are undamaged and undegraded during storage.

4. Quarterly Maintenance (After Every 3 Months)

Quarterly maintenance involves comprehensive inspections to identify potential faults and evaluate components, including:

(1) Comprehensive Disassembly Inspection: Fully disassemble core components (e.g., pump body, nozzles, heaters) to check for wear or corrosion; replace severely worn components promptly. Inspect internal pipeline corrosion and replace corroded pipelines if necessary.

(2) Electrical System Inspection: Check connections of electrical lines and interfaces for aging or looseness; inspect the operational status of components inside the control cabinet and clean dust to prevent short circuits.

(3) Maintenance File Review: Review maintenance and fault records from the past three months to analyze failure patterns, adjust maintenance priorities, and refine maintenance cycles.

5. Annual Maintenance (After Yearly Operations)

Annual maintenance is a major overhaul combining the equipment’s service life and operational status to ensure stable performance in the next year, including:

(1) Overall Equipment Assessment: Evaluate the overall operational status of the equipment, assess the aging degree of core components, and formulate a component replacement plan (e.g., pumps and sensors with longer service lives).

(2) Comprehensive Overhaul: Conduct full repairs on the electrical, mechanical, and chemical systems; replace severely aged or worn components. Perform comprehensive calibration to ensure operational accuracy meets design standards.

(3) Maintenance Plan Optimization: Optimize the next year’s preventive maintenance plan based on this year’s fault records and maintenance effectiveness, adjusting cycles and contents to reduce failure rates.